Handling- en transport tools
ASML is the largest supplier of photolithography systems for the global semiconductor industry. The headquarters are based in the Eindhoven region in the Netherlands. These delicate, complex and expensive systems demand the highest standards and precision in all areas, including handling and transport. ASML ships its systems all over the world in submodules weighing from 3 to as much as 11 tons. The module weight, comparable to that of a small truck, is transferred and assembled with the aid of a range of tools and hoisting equipment. These handling and transport tools need to meet the highest standards and specifications of ASML.
A cleanroom-proof design and suitable interfaces are additional requirements that create interesting technical challenges in the field of engineering. Each tool is tested, inspected and fully evaluated before it can finally be released. We are responsible for the mechanical design, as well as FEM calculations, drawings and documentation. Involvement at an early stage is vital to the protective and supporting functions of these handling and transport tools. Certain tools are buffered and spring loaded in order to counteract G-forces during transport. The handling and transport tools mean that ASML is less dependant on the skill of its employees and able to trust in the intelligence of the tool.